An exciplex-halogen high-frequency radiation source on mixtures of krypton and xenon with chlorine molecules

The results of optimization of a broadband ultraviolet (UV) radiation source, which is excited with a transverse radio-frequency low-pressure discharge with a planar aperture, are presented. The UV source operates on Kr-Cl₂ and Kr-Xe-Cl₂ working mixtures. The UV source operates on the system of electron vibrational bands of XeCl* and KrCl* exciplex molecules and chlorine molecules in the spectral range 210–310 nm. The average radiation power reaches 30–50 W at an efficiency of 10–15%.