| 基于相位恢复技术的大型光学镜面面形在位检测技术 |
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| 引用本文： | 吴宇列,胡晓军,戴一帆,李圣怡.基于相位恢复技术的大型光学镜面面形在位检测技术[J].机械工程学报,2009,45(2). |
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| 作者姓名： | 吴宇列 胡晓军 戴一帆 李圣怡 |
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| 作者单位： | 国防科技大学机电工程与自动化学院,长沙,410073 |
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| 摘 要： | 根据目前大镜加工在位检测的需求和面临的困难,把基于衍射图像检测的相位恢复技术应用到大镜面形的在位检测,建立大镜加工在位检测系统.对影响测量系统精度的主要因素以及系统的抗振动性能进行了分析和仿真,结果表明该测量系统具有较好的抗振动能力,精度接近标准球面波光源的精度.基于GS迭代算法开发了测量软件,对( 500 mm球面镜进行在位测量.把相位恢复测量结果与高精度的ZYGO干涉仪测量结果进行比较分析,结果表明在面形误差分布及误差的峰谷值(PV)和方均根值(RMS)上,两者具有较高程度的一致性,这说明相位恢复测量方法的可行性和准确性.由该方法构成的在位测量系统具有光路简单、精度较高、抗振动能力强和操作简单等特点,完全满足大镜的在位测量需求.
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| 关 键 词： | 相位恢复 大镜 在位检测 |
In-situ Surface Measurement for Large Aperture Optical Mirror Based on Phase Retrieval Technology |
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| WU Yulie,HU Xiaojun,DAI Yifan,LI Shengyi.In-situ Surface Measurement for Large Aperture Optical Mirror Based on Phase Retrieval Technology[J].Chinese Journal of Mechanical Engineering,2009,45(2). |
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| Authors: | WU Yulie HU Xiaojun DAI Yifan LI Shengyi |
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| Affiliation: | School of Mechatronics Engineering and Automation;National University of Defense Technology;Changsha 410073 |
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| Abstract: | According to the present demand for in-situ surface measurement of large aperture optical mirrors and the difficulties faced,a new method based on phase retrieval technology is proposed and an in-situ measurement system is established.Main factors that influence the accuracy of measurement system and the anti-vibration ability of system are analyzed and simulated.The results show that the measurement system has good anti-vibration ability,and the accuracy is close to that of standard spherical wave light so... |
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| Keywords: | Phase retrieval Large aperture mirror In-situ measurement |
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