| 衬底负偏压增强金刚石成核机制的研究进展 |
| |
| 引用本文： | 王必本,王万录,廖克俊,肖金龙. 衬底负偏压增强金刚石成核机制的研究进展[J]. 材料导报, 2000, 14(4): 44-45 |
| |
| 作者姓名： | 王必本 王万录 廖克俊 肖金龙 |
| |
| 作者单位： | 重庆大学理学院应用物理系,重庆,400044 |
| |
| 基金项目： | 国家自然科学基金(No，19904016) |
| |
| 摘 要： | 综述了近几年来对衬底负偏压增强金刚石成核机制的研究,并且对各种机制进行了分析和讨论,提出了今后有待研究的问题。
|
| 关 键 词： | 衬底负偏压 成核机制 金刚石薄膜 化学气相沉积 |
Progress of Study on Mechanisms of Negative Substrate Bias Enhanced Diamond Nucleation |
| |
| Wang Biben,Wang Wanlu,Liao Kejun,Xiao Jinlong. Progress of Study on Mechanisms of Negative Substrate Bias Enhanced Diamond Nucleation[J]. Materials Review, 2000, 14(4): 44-45 |
| |
| Authors: | Wang Biben Wang Wanlu Liao Kejun Xiao Jinlong |
| |
| Abstract: | In this paper,the studies on mechanisms of negative substrate bias enhanced diamond nucleation in recent years were reviewed. Various mechanisms were analyzed and discussed. Some problems to be addressed in fu ture research were outlined. |
| |
| Keywords: | negative substrate bias mechanism of nucleation diamond film |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
