基于干涉条纹的激光准直技术的检测系统

为了获得被测导轨的直线度误差信息,采用半导体激光器发出的激光,经准直扩束后照射到楔形平板上,利用楔形平板上下表面的反射作用,将这束激光分解为交角2α的交叉光束,在这两条平行激光束交叉的范围内产生干涉条纹。将此干涉光作为准直测量的基准,用线阵CCD作为光电转换器件固定在接收靶上;检测接收靶处于被测导轨任一测量点时干涉条纹在接收靶上的位置,得到了该测量点与准直光束的偏移量。进行了重复性实验以及与光电自准直仪的比对实验。在测量长度842mm时,直线度误差18.96μm,测量长度最远可达14m。结果表明,样机的性能、指标基本达到了预定目标。

Laser Alignment Measuring and Testing Equipment Based on Interference Fringe

A kind of laser alignment equipment based on interference fringe has been developed. After collimated and broadened, the semiconductor laser beam is exposured on the wedge-shaped plate. By reflecting on the two surfaces of the wedge-shaped plate, two cross beams of cross angular are obtained, where the interference fringe appears. The interference beam was used to be the measuring basis, and the linear CCD is fixed on the receiving target. The distance between the measured point and the measure basis is got by detecting the interference beam position on the receiving target. Then a few experiments have been done, such as the comparison test, the air agitation test, system stability and reiteration test of the model instrument in contrast to the photo-electricity autocollimator. The results indicate that the performances have met the scheduled targets.