表面特性光学实时检测的理论和实验研究

针对精密磨削加工中冷却液的使用使得工件表面的光学实时检测非常困难这一问题,提出了一种在冷却液环境下借助特制透明窗装置的光学方法。此方法使被测表面上方出现附加层,分别对附加层中的液体处于静止和流动状态时的情况进行了理论分析和实验研究。对于静态液体,利用修改的B-K(Beckmann-Kirch-hoff)散射模型,从采集到的散射光强分布图中提取出一比值参数,通过参数拟合得到表面粗糙度和比值参数间的关系曲线。对于动态液体,分析光束在流体层中的传播特性,计算通过流动液体层的光束偏移量。结果表明:静态液体时,垂直于散射光带主方向的比值参数能够用来衡量表面轮廓算术平均偏差粗糙度,它们之间可以用explinear函数拟合;动态液体时,通过流体层的光束偏移量非常小,只有0.494×10-5μm。可见,液体的流动对于光学实时检测的影响非常小,液体处于静止状态时的测量结果可以作为表面特性实时检测的最终结果。

Theoretical and experimental investigation on the optical in-process measurement of surface characteristics

The opaque property of the coolants can be a problem for in-process measurement of workpiece surface quality using optical methods in the machining process.In order to solve this problem,a transparent window method,in which an optically clean zone is produced on the surface,has been proposed.In this method,the transparent additional layers contain the glass applicator and clean fluid layers appear on the surface,so theoretical and experimental investigation are processed by analyzing the static and flowing ...