| 穿透散射法测定氮化钽薄膜的原子比 |
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| 引用本文： | 张达明,吴俊恒,王玟珉,胡序胜.穿透散射法测定氮化钽薄膜的原子比[J].核技术,1985(7). |
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| 作者姓名： | 张达明 吴俊恒 王玟珉 胡序胜 |
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| 作者单位： | 中国科学院上海原子核研究所
(张达明，吴俊恒，王玟珉)，中国科学院上海原子核研究所(胡序胜) |
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| 摘 要： | 高精度、高稳定性氮化钽薄膜电阻器,是先在二极阴极溅射钽的同时,向真空室内充入适当量的氮气,进行反应溅射而获得氮化钽膜,再经过热处理和阻值调整后而制得的。实践表明,严格控制制作工艺过程中的氮气分压,使之生成具有一定氮-钽原子比值的薄膜,是制备优质氮化钽薄膜电阻器的关键之一。
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| 关 键 词： | 穿透散射 原子比 |
Atomic ratio determination of tantalum nitride foil by transmissive scattering |
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| Zhang Daming Wu JunhengWang Wenmin Hu Xusheng.Atomic ratio determination of tantalum nitride foil by transmissive scattering[J].Nuclear Techniques,1985(7). |
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| Authors: | Zhang Daming Wu JunhengWang Wenmin Hu Xusheng |
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| Abstract: | The atomic ratio of tantalum nitride foil has been measured by means of transmis-sive scattering. The atomic ratio in a thin foil sample can be determined accurately due to the fact that the peaks corresponding to different components can be separated easily. |
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| Keywords: | transmissive scattering atomic ratio |
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