低压气相金刚石薄膜涂层刀具膜/基附着性能测试方法研究进展

较全面介绍了金刚石薄膜涂层刀具膜/基结合强度的定性和定量测试与表征方法。定性方法主要有划痕法、压痕法、超声波法等,其操作简单、结果直观,但实验结果不精确并且缺乏可比性;定量方法主要有粘接拉伸法、刮剥式测量法、纳米压入法、内涨鼓泡法、梁弯曲法等,这些方法不同程度地提高了测量的准确性和精确度,但试验条件要求苛刻、设备复杂、薄膜样品制备困难等问题限制了其广泛应用。总的来看,采用单一方法直接用于金刚石薄膜刀具膜/基附着强度的有效表征还有较大的困难。因此,需要在前人工作基础上,通过研究这些方法的优势互补,或者通过新方法研究,建立综合评价金刚石薄膜的膜/基界面结合强度的有效与合理方法,为金刚石薄膜硬质合金刀具的制备提供科学依据。

Research progress of test methods for evaluating the adhesion of diamond thin films coated on cutting tools in low pressure vapor phase

This paper comprehensively introduced the qualitative and quantitative evaluating methods for the adhesive strength of diamond thin film deposited on cutting tools.Qualitative evaluating methods include Scratch Test Method,Indentation Test Method,Ultrasonic Strength Test Method,etc.These methods are characterized by easy operation,direct-vision results,but the results are inaccurate and incomparable.Quantitative evaluating methods include Direct Tensile Test Method,Scraping Test Method,Nano-indentation Test Method,Bulge/Blister Test Method,Beam Bend Test Method,etc.These methods can enhance the results' accuracy,but harsh experiment demand,complicated equipment,difficult preparation of film sample restrict their extensive application.Therefore,only one method is hard to effectively evaluate the adhesive strength of diamond thin film.Based on the previous efforts,using these methods' advantage complementarities or studying new methods can make one effective mechanism established for comprehensively evaluating the adhesive strength of diamond thin film,which provides scientific basis for producing diamond thin film coated on cutting tools.