前驱体浓度对超声雾化热解法制备ZnO薄膜性能的影响

采用超声雾化技术,以醋酸锌水溶液为前驱体溶液,在加热的玻璃衬底上制备得到ZnO薄膜.研究了不同前驱体溶液浓度和不同加热温度条件下制得的ZnO薄膜的微观结构和光学性能.测试结果表明,ZnO薄膜为六角纤锌矿结构,在合适的条件下可以制备出沿(002)晶面取向生长的样品,具有优良的均匀性和致密性.同时在可见光区也表现出80%以上的高透过率.

Effects of Different Concentrations of Precursor Solution on the Property of ZnO Films Prepared by Ultrasonic Spray Pyrolysis Method

ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method, zinc acetate solutions were used as the precursor material. The crystalline and microstructure of the thin films prepared through different concentrations of precursor solutions have been carefully analyzed. The results show that the ZnO thin films exhibit the hexagonal wurtzite polycrystalline structure. Samples that grown in suitable conditions have the dense smooth and homogenous structure and exhibit the preferential orientation of (002) to the substrate surface. And these films have a high visible transmittance of above 80%.