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?/4-shifted InGaAsP/InP DFB lasers by simultaneous holographic exposure of positive and negative photoresists
Authors:Utaka   K. Akiba   S. Sakai   K. Matsushima   Y.
Affiliation:KDD Research & Development Laboratories, Tokyo, Japan;
Abstract:?/4-shifted InGaAsP/InP DFB lasers were fabricated by a novel method, that is, simultaneous holographic exposure of positive and negative photoresists. The ?/4-phase-shift in the first-order corrugations formed on an InP substrate was confirmed through SEM views and diffracted beam patterns. A strong resonance peak below the threshold and single-wavelength operation above it at the Bragg wavelength were observed.
Keywords:
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