| 溶胶–凝胶法制备BST薄膜的结晶特性研究 |
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| 引用本文： | 方瑜,肖定全,袁小武,于光龙,卢苇,朱建国.溶胶–凝胶法制备BST薄膜的结晶特性研究[J].电子元件与材料,2005,24(1):25-28. |
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| 作者姓名： | 方瑜 肖定全 袁小武 于光龙 卢苇 朱建国 |
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| 作者单位： | 四川大学材料科学与工程学院,四川,成都,610064 |
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| 摘 要： | 采用改进的溶胶–凝胶(sol-gel)工艺配制了(Ba0.65,Sr0.35)TiO3(BST)溶胶。利用旋转涂覆工艺将BST溶胶涂覆在SiO2/Si衬底上,在不同的热处理条件下制备出BST薄膜。XRD分析结果表明:制得的BST薄膜形成了单一钙钛矿结构;AFM测试结果表明,BST薄膜表面平整致密,无裂纹。表面均方根粗糙度为3~6nm,晶粒大小分布均匀,直径约为40~100nm。随着热处理温度的提高,BST薄膜的晶粒变大,表面粗糙度变大。
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| 关 键 词： | 无机非金属材料 BST薄膜 溶胶–凝胶法(sol-gel) 微结构 |
| 文章编号： | 1001-2028(2005)01-0025-04 |
Research on the Crystalline Properties of (Ba0.65Sr0.35)TiO3 Thin Films Prepared by Sol-gel Method |
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| FANG Yu,XIAO Ding-quan,YUAN Xiao-wu,YU Guang-long,LU Wei,ZHU Jian-guo.Research on the Crystalline Properties of (Ba0.65Sr0.35)TiO3 Thin Films Prepared by Sol-gel Method[J].Electronic Components & Materials,2005,24(1):25-28. |
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| Authors: | FANG Yu XIAO Ding-quan YUAN Xiao-wu YU Guang-long LU Wei ZHU Jian-guo |
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| Abstract: | Ba0.65,Sr0.35)TiO3(BST) sols were prepared by an improved sol-gel method. Using a spinning-coating process, the BST sols were coated on SiO2/Si substrates and then they were annealed to form crystalline BST thin films at different temperature conditions. XRD analyses show that all the BST films have formed pure cubic perovskite structure; AFM graphs show that BST films are smooth, dense and crack-free microstructure. The Root Mean Square of these films is 3~6 nm and the average grain sizes is 40~100 nm. The RMS and grain size of BST films become larger with higher annealing temperature. |
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| Keywords: | inorganic non-metallic materials BST thin films sol-gel method microstructure |
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