| 高温氧化扩散炉温控系统设计 |
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| 引用本文： | 杨一博,尹文生,王春洪,朱煜,张明超. 高温氧化扩散炉温控系统设计[J]. 半导体技术, 2009, 34(1) |
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| 作者姓名： | 杨一博 尹文生 王春洪 朱煜 张明超 |
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| 作者单位： | 清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084 |
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| 摘 要： | 针对半导体行业高温氧化扩散炉设备设计、实现了一套炉温控制软硬件系统.硬件系统由多路开关、温度变送器、工控机、信号输入输出板卡组成.在此硬件基础上根据工艺要求设计控温软件的结构与算法,改进了PID参数整定算法,引入了轨迹规划算法,完成了多段炉体的控温、斜变升温、PID参数整定和自动温区分布.实验表明,在此系统控制下,炉体能够迭到高温氧化扩散工艺的需求,并且系统的扩展性、稳定性、精确性等方面得到了提高.此温度控制系统已经应用于工业用高温氧化扩散炉设备.
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| 关 键 词： | 扩散炉 温度控制 PID自整定 轨迹规划 |
Temperature Control System for High Temperature Oxidation Diffusion Furnace |
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| Yang Yibo,Yin Wensheng,Wang Chunhong,Zhu Yu,Zhang Mingchao. Temperature Control System for High Temperature Oxidation Diffusion Furnace[J]. Semiconductor Technology, 2009, 34(1) |
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| Authors: | Yang Yibo Yin Wensheng Wang Chunhong Zhu Yu Zhang Mingchao |
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| Affiliation: | Department of Precision Instruments and Mechanology;Tsinghua University;Beijing 100084;China |
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| Abstract: | A hardware and software system for a high temperature oxidation diffusion furnace based on the technical demand was introduced.The hardware system was composed by a multi-channel switch,an industrial computer,a temperature transmitter,and I/O cards.Based on this hardware system the algorithm of the PID tuning was improved,and the trajectory planning algorithm was introduced.Finally,this system functions were fulfilled of the control,ramp,PID auto-tuning and automatic temperature distribution.The experiments... |
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| Keywords: | diffusion furnace temperature control PID self-tuning trajectory planning |
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