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| 电磁驱动RFMEMS开关的研究状况 | |
| 引用本文： | 李全宝,景玉鹏,刘茂哲,陈大鹏,欧毅,马瑾,叶甜春.电磁驱动RFMEMS开关的研究状况[J].电子工业专用设备,2007,36(1):18-20,30. |
| 作者姓名： | 李全宝 景玉鹏 刘茂哲 陈大鹏 欧毅 马瑾 叶甜春 |
| 作者单位： | 1. 山东大学物理与微电子学院,山东济南;中国科学院微电子研究所,北京 2. 中国科学院微电子研究所,北京 3. 山东大学物理与微电子学院,山东济南 |
| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划)，中国科学院微电子所所长基金 |
| 摘 要： | RFMEMS技术在民用和军事方面有巨大的潜力,作为其核心器件的RFMEMS开关很有希望在雷达和通信领域之中成为关键器件。电磁驱动RFMEMS开关具有工作电压比较低,驱动力大,可以工作在恶劣的环境等优点,使其成为近年来RFMEMS开关研究的一个热点。 |
| 关 键 词： | RFMEMS技术 RFMEMS开关 电磁驱动 工作电压 驱动力 |
| 文章编号： | 1004-4507（2007）00-0018-03 |
| 修稿时间： | 2006-12-05 |
The Study of Electro-magnetically RF MEMS Switches |
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| LI Quan-bao,JING Yu-peng,LIU Mao-zhe,CHEN Da-peng,Ou Yi,Ma Jin,YE Tian-chun.The Study of Electro-magnetically RF MEMS Switches[J].Equipment for Electronic Products Marufacturing,2007,36(1):18-20,30. | |
| Authors: | LI Quan-bao JING Yu-peng LIU Mao-zhe CHEN Da-peng Ou Yi Ma Jin YE Tian-chun |
| Affiliation: | 1. College of Physics and microelectronics, Shandong University, Jinan Shandong China; 2. Institute of Microelectronics of Chinese Academy of Science, Beijing, China |
| Abstract: | RF MEMS technology has a great potential in the civilian and military applications, switches which are the core of the RF MEMS technology will hopefully become the key device in the radar and communication systems. The electro-magnetically actuated RF MEMS switches have some advantages over the other switches, such as low operating voltage, large driving force, and tolerance to the poor working conditions of dusty, humid, and low temperature, so the study of the magnetic RF MEMS switches has become a hotspot in recent years. |
| Keywords: | RF MEMS technology RF MEMS switches Electro-magnetically actuated Operating voltage Driving force |
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