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H- Beam Stripping Loss at Background Partial Pressure of Ar
Authors:Hu Chundong  Wang Shaohu  Hu Liqun
Abstract:It has been observed that H- current could be improved by adding Ar to H2 plasma.But due to a slower pumping speed for Ar with the existing pumping scheme, the tank pressure will increase quickly during the length of a beam pulse. Since H- stripping loss depends on the tank pressure and gas species, part of the H- beam can be converted to H0 and then H0 can be converted into H with background H2 and Ar gas thickness. Therefore, the H- beam current,measured by a Faraday cup, situated at a distance L from GG (ground grid), will decrease because it will be converted into a H current. This gives a ratio of the Faraday cup net current to the H- beam current before stripping at background partial pressure of Ar.
Keywords:H- beam  stripping loss  Ar gas thickness
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