Fabrication of resistance type humidity sensor based on CaCu3Ti4O12 thick film |
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| Affiliation: | 1. School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;2. School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;1. School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;2. School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;3. Center for Nanoscience and Technology, Institute of Science and Technology, Jawaharlal Nehru Technological University Hyderabad, Telangana 500085, India;1. Center for Thermometry, Division of Physical Metrology, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea;2. Department of Electronic Engineering, Hanbat National University, Daejeon 34158, Republic of Korea;1. College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, 211100 Nanjing, China;2. Jiangsu Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics and Astronautics, 211100 Nanjing, China;1. Structural Materials Niche Area, School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia;2. School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia |
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| Abstract: | A resistance type humidity sensor has been fabricated from an assembly of CaCu3Ti4O12 thick film, Ag interdigitated electrodes, and an Al2O3 ceramic substrate. The humidity sensing properties were measured using the direct current (DC) analysis method. The results show that the electrical properties of the CaCu3Ti4O12 thick film are dependent on humidity and applied voltage. At low humidity, the film exhibited low conductivity and behaved as an insulator. However, at high humidity, the conductivity of the film increased due to the enhancement of ion conduction. These outcomes indicate that the measured resistance is highly dependent on the applied bias voltage within the whole humidity range i.e. 20–90% relative humidity (RH) at ambient temperature. The response and recovery times as well as sensitivity were determined to be around 2.8 min, 25 min, and 98.2%, respectively. Therefore, it is concluded that CaCu3Ti4O12 thick film has good humidity sensing properties and has high potential in the application for fabrication of high-performance humidity sensors. |
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| Keywords: | Alumina substrate RH sensor Response time Recovery time Sensitivity Ag electrode |
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