A signal interpolation method for Fabry–Perot interferometer utilized in mechanical vibration measurement |
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| Affiliation: | 1. Department of Electro-Optical Engineering, Yunlin 632, Taiwan;2. Department of Mechanical Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan;3. Institute of Process Measurement and Sensor Technology, Technical University of Ilmenau, Ilmenau 98693, Germany;1. Institute of Measurement and Automatic Control, Leibniz Universität Hannover, Nienburger Straße 17, 30167 Hannover, Germany;2. Institut für Informationsverarbeitung (TNT), Leibniz Universität Hannover, Appelstr. 9A, 30167 Hannover, Germany;1. Center for Mathematical Modeling (CMM), UMI (2807), UCHILE-CNRS, Chile;2. Mining Information Communications and Monitoring (Micomo), Fundación Chile, Chile |
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| Abstract: | In this investigation, a self-developed signal processing method for Fabry–Perot interferometer is proposed which can be utilized for high-speed dynamic displacement measurements, e.g. mechanical vibration measurements. The lookup table (LUT) integrated with the interference intensity equation has been employed for the interpolation processing of interference signals. With the aid of this method, the interpolation error has been reduced by 40% in comparison with that resulting from the commercial sinusoidal signal processing module. By operations of Fast Fourier Transform (FFT), the displacement measurement distribution can be converted into the frequency spectrum diagram. The interpolation resolution of the proposed interferometric displacement measurement system is about 0.1 nm. Experimental results demonstrate that this interferometer system is available for measuring frequencies till 2 kHz where its corresponding amplitude is 0.15 μm. |
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| Keywords: | Fabry–Perot interferometer Interpolation model Lookup table (LUT) method Fitted method Frequency spectrum |
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