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Absolute interferometric test for high numerical-aperture spherical concave surfaces: Gravitational effect
Affiliation:1. National Metrology Institute of Japan, National Institute of Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan;2. The Graduate School for the Creation of New Photonics Industries, Hamamatsu, Shizuoka 431-1202, Japan;3. Graduate School of Mechanical Engineering, Pusan National University 2, Busandaehak-ro 63 beon-gil, Geumjeong-gu, Busan 46241, Repubilc of Korea;1. Dept. of Information Technology and Electrical Engineering, University of Naples “Federico II”, via Claudio 21, 80125 Naples, Italy;2. Dept. of Electrical and Information Engineering, University of Cassino and Southern Lazio, via G. Di Biasio, 43, 03043 Cassino, Italy;1. AGH University of Science and Technology, Department of Electronics, Krakow, Poland;2. Silicon Creations, 49 Highway 23 NE, Suwanee, GA 30024, USA;3. Singulus Technologies AG, 63796 Kahl am Main, Germany;4. INESC-MN and IN, 1000-029 Lisbon, Portugal;5. Physics Department, Instituto Superior Tecnico, Universidade de Lisboa, Portugal;6. INL-International Iberian Nanotechnology Laboratory, Avenida Mestre José Veiga s/n, 4715-330 Braga, Portugal;1. School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China;2. College of Electronic and Information Engineering, Anhui JIANZHU University, Hefei 230601, China;1. Department of Wood and Paper Science and Technology, Faculty of Natural Resources, University of Tehran, Karaj, Iran;2. Department of Chemical Technologies, Iranian Research Organization for Science and Technology (IROST), P.O. Box 33535111, Tehran, Iran
Abstract:Spherical concave surfaces with high numerical apertures are required in industry for lithography optics at ultraviolet and X-ray wavelengths. Among the systematic errors in these spherical-surface test, the gravitational deformation has not been separated from the other optical aberrations. We utilized a two-surface comparison method to quantify the gravitational deformation in a vertical Fizeau interferometer. Certain aberrations vary with rotation around the optical axis. We averaged the ordinary aberrations and isolated the aberration caused by gravitational deformation. Experimental results show that a 4-in concave surface with an F-number 0.75 reveals to have a gravitational deformation of 7 nm peak-to-valley.
Keywords:Spherical concave test  Fizeau interferometer  Phase measurement  Gravitational deformation  Phase shift
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