Non-contact measurement technique for dimensional metrology using optical comb |
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| Affiliation: | 1. School of Automation, Guangdong University of Technology, No. 100 Waihuan Xi Road, Panyu District, Guangzhou, 510006, China;2. Guangdong Key Laboratory of IoT Information Technology, Guangzhou, 510006, China;3. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangzhou, 510006, China;4. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8904, Japan;5. Faculty of Engineering, Department of Precision Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan;6. Department of Mechanical Engineering, Nagaoka University of Technology, Nagaoka City, Niigata 940-2188, Japan |
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| Abstract: | This paper proposes a non-contact pulsed interferometer for dimensional metrology using the repetition frequency of an optical frequency comb. A compact absolute-length measuring system is established for practical non-contact measurement based on a single-mode fiber interferometer. The stability and accuracy of the measurements are compared with those from a commercial incremental laser interferometer. The drifts of both systems have the same tendency and a maximum difference is approximately 0.1 μm. Subsequently, preliminary absolute-length measurements up to 1.5 m were measured. The signal-to-noise ratios of the small signals are improved by a frequency-selective amplifier. It is apparent that the noise is rejected, and the intensity of the interference fringes is amplified, achieving a maximum standard deviation of measurement approximately 1 μm. The proposed technique can provide sufficient accuracy for non-contact measurement in applications such as a simple laser-pulse tracking system. |
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| Keywords: | Non-contact measurement Pulse interferometer Absolute length measurement Dimensional metrology |
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