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Non-reflecting silicon and polymer surfaces by plasma etching and replication |
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| Authors: | Sainiemi Lauri Jokinen Ville Shah Ali Shpak Maksim Aura Susanna Suvanto Pia Franssila Sami |
| Affiliation: | Department of Materials Science and Engineering, Aalto University School of Science and Technology, P.O. Box 16200, FIN-00076 Aalto, Finland. Lauri.Sainiemi@tkk.fi |
| Abstract: | |
| Keywords: | nanofabrication reflection suppression self‐cleaning surfaces plasma etching |
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