Effects of Homo-buffer Layer on Properties of Sputter-deposited ZnO Films |
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Authors: | Jian Huang Linjun Wang Run Xu Weimin Shi Yiben Xia School of Materials Science Engineering Shanghai University Shanghai China |
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Affiliation: | Jian Huang,Linjun Wang,Run Xu,Weimin Shi , Yiben Xia School of Materials Science , Engineering,Shanghai University,Shanghai 200072,China |
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Abstract: | Two-step growth regimes were applied to realize a homoepitaxial growth of ZnO films on freestanding diamond substrates by radio-frequency(RF)reactive magnetron sputtering method.ZnO buer layers were deposited on freestanding diamond substrates at a low sputtering power of 50 W,and then ZnO main layers were prepared on this buffer layer at a high sputtering power of 150 W.For comparison,a sample was also deposited directly on freestanding diamond substrate at a power of 150 W.The effects of ZnO buffer layers... |
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Keywords: | Freestanding diamond ZnO film Buffer layer Magnetron sputtering |
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