高质量玻璃微孔电化学放电加工模型及试验

超白玻璃是一种超透明低铁玻璃,因其具有优越的物理、光学性能,而广泛应用于精密电子、高档汽车及太阳能光伏发电领域。由于其本身的硬脆特性,玻璃微孔的出口极易破损,为提高玻璃微孔的加工定域性,降低微孔出口破损的可能性,对微细电化学放电钻削加工工艺进行了研究与优化。首先,根据电化学放电原理,探讨了气膜的形成和材料去除机理,分析了放电能量对玻璃微孔加工工艺的影响,建立了单位时间电化学放电加工能量控制模型;其次,试验分析了电压幅值、占空比、脉冲频率、进给速度等主要参数对微孔入口直径和出口质量的影响;最后,通过优化后的加工参数在厚度为300μm的超白玻璃试件上,成功加工得到入口直径为172μm、出口直径为167μm的3×3微孔阵列结构,出口无破损现象。实验结果表明,基于脉冲能量控制的微细电化学放电钻削工艺在玻璃微孔加工方面很有潜力。

Electrochemical discharge machining of glass micro-holes with high-quality

Ultra-white glass is a kind of transparent low-iron glass. Owing to its excellent physical and optical properties, it is widely used in many fields such as precision electronics, luxury automobiles, and solar photovoltaic power generation. Because of its hard and brittle characteristics, the outlets of glass micro-holes are easily damaged. In order to improve the machining localization of glass micro-holes and reduce the possibility of micro-hole outlet damage, the micro electrochemical discharge drilling process was studied and optimized. Firstly, according to the principle of electrochemical discharge, the film forming mechanism and the material removal mechanism were discussed, the influence of discharge energy on the micro-holes machining technology of glass was analyzed, and an energy control model of electrochemical discharge was established. Secondly, according to the experiment, the influence of pulse voltage, frequency, and feed rate on the inlet diameter and outlet quality of the micro-holes was analyzed. Finally, the optimized parameters were chosen to fabricate a 3×3 high quality glass micro holes array with an inlet diameter of 172 μm and an outlet diameter of 167 μm on an ultra-white glass workpiece with a thickness of 300 μm; the outlets exhibited no signs of damage. The experimental results show that under the control of the discharge energy, micro electrochemical discharge drilling technology has great potential in glass micro-hole machining.