| 光学非球面磁性复合流体抛光运动控制及误差分析 |
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| 引用本文： | 王鹏,姜晨,陆葳坪,任鹤.光学非球面磁性复合流体抛光运动控制及误差分析[J].光学仪器,2018,40(2):25-30. |
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| 作者姓名： | 王鹏 姜晨 陆葳坪 任鹤 |
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| 作者单位： | 上海理工大学机械工程学院 |
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| 摘 要： | 针对精密光学系统中对高精度光学非球面元件的加工需求,设计磁性复合流体抛光的直线光栅式运动轨迹,并通过运动轨迹和非球面方程计算出各抛光加工点坐标。根据工件表面形貌和抛光头运动姿态设计了抛光加工路径,建立各抛光加工点间的弓高误差模型,通过模型对工件表面弓高误差变化规律进行仿真分析。仿真结果表明,弓高误差会随着Y轴上步长的增大而增大。这对非球面超精密加工具产生了深远的影响,促进了光学元件超精密高效制造技术的发展。
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| 关 键 词： | 磁性复合流体 光学非球面 误差分析 路径规划 |
| 收稿时间： | 2017/12/1 0:00:00 |
The control and error analysis for magnetic compound fluid polishing of optical aspheric components |
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| WANG Peng,JIANG Chen,LU Weiping and REN He.The control and error analysis for magnetic compound fluid polishing of optical aspheric components[J].Optical Instruments,2018,40(2):25-30. |
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| Authors: | WANG Peng JIANG Chen LU Weiping and REN He |
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| Affiliation: | School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China and School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China |
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| Abstract: | In order to meet the requirement of the processing of high-precision aspheric optical elements in the optical systems,the linear grating motion trajectory of magnetic composite fluid polishing is designed.According to the motion trajectory and the aspheric equation,the coordinates of each polishing processing point are calculated.The polishing path is designed according to the surface topography and the polishing head which is relative to the geometry of the workpiece.The model of high-height error between each polishing point is established,and the variation of the surface arch error of workpiece is simulated by the model.The arch error increases with the increase in the Y dimension. |
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| Keywords: | magnetic composite fluid optical aspheric error analysis path planning |
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