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基于TDLAS和ICL的紧凑中红外痕量气体探测系统
引用本文:李春光,董磊,王一丁,林君. 基于TDLAS和ICL的紧凑中红外痕量气体探测系统[J]. 光学精密工程, 2018, 26(8): 1855-1861. DOI: 10.3788/OPE.20182608.1855
作者姓名:李春光  董磊  王一丁  林君
作者单位:1. 吉林大学 仪器科学与电气工程学院, 吉林 长春 130061;2. 山西大学 激光光谱研究所 量子光学与光量子器件国家重点实验室, 山西 太原 030006;3. 吉林大学 电子科学与工程学院 集成光电子学国家重点联合实验室, 吉林 长春 130012;4. 吉林大学 生物与农业工程学院, 吉林 长春 130022
基金项目:博士后创新人才支持计划项目(No.BX201700100);中国博士后科学基金资助项目(No.2017M621206);国家自然科学基金资助项目(No.61622503,61575113,61307124,No.61805099)
摘    要:为了实现基于可调谐激光吸收光谱技术的高检测灵敏度、低功耗、小型中红外痕量气体传感器设计,结合锑化镓(GaSb)ICL和紧凑型多反射气体吸收气室(MPC)研制了基于不同结构传感光学核的两个小型TDLAS传感系统。两个传感光学核的总功率消耗为3.7 W,并通过探测甲烷(CH4)和甲醛(CH2O)分别验证了双层结构和单层结构系统的性能。实验结果表明:CH4和CH2O系统的检测灵敏度分别为5.0nL/L和3.0nL/L,测量精度分别为1.4nL/L和1.0nL/L。此外,相同配置情况下将两种结构系统应用于甲、乙烷(C2H6)同步检测,通过对校园环境中甲、乙烷进行连续66h的监测试验,验证了设计的紧凑型中红外痕量气体检测系统能够稳定有效地工作,基本满足目前民用气体测量的稳定可靠、精度高、抗干扰能力强等要求。

关 键 词:激光传感器  半导体激光器  量子级联  光谱  红外
收稿时间:2018-04-23

Compact mid-infrared trace gas detection system based on TDLAS and ICL
LI Chun-guang,DONG Lei,WANG Yi-ding,LIN Jun. Compact mid-infrared trace gas detection system based on TDLAS and ICL[J]. Optics and Precision Engineering, 2018, 26(8): 1855-1861. DOI: 10.3788/OPE.20182608.1855
Authors:LI Chun-guang  DONG Lei  WANG Yi-ding  LIN Jun
Affiliation:1. College of Instrumentation & Electrical Engineering, Jilin University, Changchun 130061, China;2. State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China;3. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;4. College of Biological and Agricultural Engineering, Jilin University, Changchun 130022, China
Abstract:Two compact Tunable Diode Laser Absorption Spectroscopy (TDLAS) sensor systems were developed based on different structural optical cores. The two optical cores combine two recent developments; gallium antimonide (GaSb)-based ICL and a compact multipass gas cell (MPC), with the aim of developing a compact TDLAS-based sensor for mid-IR gas detection with high detection sensitivity and low power consumption. The two-floor structure sensor was used for methane (CH4) measurements and the single-floor structure sensor was used for formaldehyde (CH2O) concentration measurements, with the two optical sensor cores consuming 3.7 W of power. Detection limits of~5 nL/L and~3 nL/L with measurement precisions of~1.4 nL/L and~1 nL/L were achieved for CH4 and CH2O concentration measurements, respectively. In addition, the two-structure system was used for CH4 and C2H6 detection under the same conditions over a period of 66 h campus. The results show that the sensors worked steadily and effectively. They can satisfy the system requirements of non-contact, online, real-time, high-precision, and rapid signal acquisition, as well as strong anti-jamming and high stability.
Keywords:laser sensors  semiconductor lasers  quantum cascade  spectroscopy  infrared
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