氮掺杂氟化非晶碳薄膜光学性质的研究

用射频等离子体增强化学气相沉积(RF-PECVD)法制备氮掺杂氟化非晶碳(a-C:F:N)薄膜.用紫外-可见分光光谱仪、椭偏仪、傅立叶变换红外光谱仪对薄膜进行了检测.结果表明:随源气体中氮气含量的增加,光学带隙先减小后升高,折射率变化情况与之相反.在其它条件相同的情况下,升高沉积温度使得薄膜的光学带隙和折射率降低.光学带隙的大小与sp2键含量密切相关,sp2键浓度越大,薄膜的光学带隙越小.

Optical Properties of Nitrogen Doping Fluorinated Amorphous Carbon Thin Films

Nitrogen doping fluorinated amorphous carbon(a-C:F:N) thin films were prepared by RF-PECVD.The films were investigated by FTIR,UV-VIS and ellipsometer.The results show that the optical band gap first decreased and then increased with the increasing of N_2 gas source.The refractive index changed in reverse order.With the increasing of temperature,the optical band gap and the refractive index reduced.It demonstrated that there was a close relation between the optical band gap and sp~2 bond structure.The optical band gap decreased with the sp~2 bond structure increasing.