| 表面等离子体波亚纳米指零系统 |
| |
| 引用本文： | 吴健,殷纯永,郭继华.表面等离子体波亚纳米指零系统[J].中国激光,2001,28(12):1079-1081. |
| |
| 作者姓名： | 吴健 殷纯永 郭继华 |
| |
| 作者单位： | 1. 清华大学精密仪器系,精密测量技术与仪器国家重点实验室,北京,100084
2. 清华大学,应用物理系,北京,100084 |
| |
| 基金项目： | 国家自然科学基金(No.5 9875 0 5 1)资助项目 |
| |
| 摘 要： | 提出了一种基于表面等离子体波(SPW)的纳米定位指零新方法。一个光纤探头可以等效于一个四层介质棱镜 金属膜 空气 光纤系统。分析了探头得到的近场光强度。分析表明光纤耦合到的光通量随空气层间距变化,利用这个特点可以建立纳米定位指零系统。实验表明该系统在 1℃恒温条件下 2 0min内的定位重复性标准偏差可以达到 2nm,分辨率为 0 1nm nV。
|
| 关 键 词： | 纳米指零 表面等离子体波 非接触测量 |
| 收稿时间： | 2000/9/11 |
Surface Plasma Wave Sub-nanometer Indicating System |
| |
| WU Jian,YIN Chun-yong,GUO Ji-hua.Surface Plasma Wave Sub-nanometer Indicating System[J].Chinese Journal of Lasers,2001,28(12):1079-1081. |
| |
| Authors: | WU Jian YIN Chun-yong GUO Ji-hua |
| |
| Affiliation: | WU Jian 1 YIN Chun-yong 1 GUO Ji-hua 2 |
| |
| Abstract: | A new method for nanometer positioning based on surface plasma wave is reported. A fiber probe approaching a coated prism can be equivalent to a four-layer prism-metal-air-fiber system. Analysis of the near-field beam intensity entering the fiber probe is presented. Theoretical analysis shows that the intensity coupling into the fibre probe changes according to the thickness of air gap. Non-contact nanometer indicating system can be set up according to this characteristic. Experiments show that standard deviation of 2 nm and resolution of 0.1 nm/nV in 20 minutes procedure of positioning repeatability can be achieved under air conditioning of ±1℃/h. |
| |
| Keywords: | nanometer indicating surface plasma wave non-contact measurement |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
