| 热丝法化学气相沉积金刚石系统温度分布与薄膜生长关系研究 |
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| 引用本文： | 戚学贵,陈则韶,王冠中.热丝法化学气相沉积金刚石系统温度分布与薄膜生长关系研究[J].材料工程,2001(11):31-34,16. |
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| 作者姓名： | 戚学贵 陈则韶 王冠中 |
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| 作者单位： | 中国科学技术大学, |
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| 基金项目： | 国家自然科学基金，59976038， |
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| 摘 要： | 对热丝化学气相沉积金刚石薄膜系统内的三种传热方式（传导、对流和辐射）进行了比较分析，数值计算了气相空间温度分布和衬底表面二维温度分布。采用热丝化学气相沉积工艺制备了金刚石薄膜，扫描电镜结果显示金刚石薄膜在不同生长区域呈现出与温度分布相关的微观结构与形貌。
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| 关 键 词： | 热丝化学气相沉积 温度场 薄膜生长 金刚石薄膜 温度分布 传热 |
| 文章编号： | 1001-4381(2001)11-0031-04 |
Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors |
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| QI Xue gui,CHEN Ze shao,WANG Guan zhong.Study of the Relationship between Temperature Field and Diamond Film Growth in Hot-filament CVD Reactors[J].Journal of Materials Engineering,2001(11):31-34,16. |
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| Authors: | QI Xue gui CHEN Ze shao WANG Guan zhong |
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| Abstract: | Heat and mass transfer affect growth rate and properties of diamond films in hot filament chemical vapor deposition reactors Thermal transfer in three ways (conduction, convection and radiation) was analyzed and the temperature fields were also numerically calculated in this paper Conduction is the dominant mechanism in gas phase thermal transfer, while the temperature field on the substrate surface is determined mainly by radiation from the filament The growth rate and microstructure of the diamond film prepared by HFCVD method is related to the temperature field on the substrate surface Large area temperature field of high uniformity, which benefits to the growth of diamond film in large scale, can be obtained by using multi filaments |
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| Keywords: | hot filament CVD diamond temperature field film growth |
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