| 基于UV-LIGA技术的微注塑金属模具的工艺研究 |
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| 引用本文： | 杜立群,秦江,刘海军,刘冲,于同敏.基于UV-LIGA技术的微注塑金属模具的工艺研究[J].微细加工技术,2006(5):51-54. |
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| 作者姓名： | 杜立群 秦江 刘海军 刘冲 于同敏 |
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| 作者单位： | 1. 大连理工大学,精密与特种加工教育部重点实验室,大连,116024
2. 大连理工大学,辽宁省微纳米技术及系统重点实验室,大连,116024 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 介绍了一种新颖的微注塑模具的制作方法———无背板生长法,它是利用负性厚SU-8光刻胶,通过低成本的UV-LIGA表面微加工工艺,直接在金属基板上电铸镍图形而制作完成的。讨论了SU-8胶与基底的结合特性以及几种去除SU-8胶的有效方法,所制作的微注塑模具已用于微注塑加工中。无背板生长工艺的突出优点是微电铸时间短、模具质量高,而且还适合于制作其他微机械组件,是目前MEMS领域中比较有发展前途的加工方法。
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| 关 键 词： | 微电铸 UV-LIGA工艺 SU-8光刻胶 微注塑模具 |
| 文章编号： | 1003-8213(2006)05-0051-04 |
| 修稿时间： | 2006年4月4日 |
Study on Process of Microinjection Metal Mold Based on UV-LIGA Technology |
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| DU Li-qun,QIN Jiang,LIU Hai-jun,LIU Chong,YU Tong-min.Study on Process of Microinjection Metal Mold Based on UV-LIGA Technology[J].Microfabrication Technology,2006(5):51-54. |
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| Authors: | DU Li-qun QIN Jiang LIU Hai-jun LIU Chong YU Tong-min |
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| Abstract: | A novel microfabrication technology of microinjection metal mold is presented,which it is called no-back-plate-growth method.By the method,the nickel micro-electroforming pattern was directly made on a metal substrate by a low-cost UV-LIGA surface micro-fabrication process using the negative thick SU-8 photoresist to form the microinjection mold.The adhesion property of the photoresist with the substrate and some effective methods of removing the photoresist were discussed.The method takes a short time for micro-electroforming and produces high quality of mold,and it is also adapted to fabricate other micro-mechanical components.So,it is a kind of processing technique with a development prospect in the MEMS field. |
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| Keywords: | micro electroforming UV-LIGA process SU-8 photoresist microinjection mold |
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