一种IC晶片导线特征检测方法的研究

针对IC晶片导线特征检测中的难点,介绍一种基于图像处理技术的导线特征分析和缺陷检测方法,把由局部缺陷引起的线路短路、开路故障分析归结为多条平行线宽和线距的分析,先通过Hough变换实现导线边缘的直线拟合和线宽、线距的亚像素测量,再根据测量结果建立起导线边缘标准模型,并把边缘图像的二维信号转换为一维信号进行分析,最终实现导线特征的分析和缺陷的定位;仿真和实际运用结果表明该方法使IC晶片导线特征分析简单化,并使缺陷分析定位变得更加方便灵活。

Research on Inspection Method for IC Circuit Character

Abstraction:A method of inspection for IC wafer circuit character is presented in this article,putting forward a point that taking on the analysis to the width of multi-parallels and the distance between them as the analysis to the circuit failure caused by local defection.The Hough transform is applied in line fitting,width and distance measurement,then building a standard model of circuit's edge,so as to realize the analysis to the feature of wire and defect position.Simulation and experimental results show that the proper method gives a simple analy- sis method of IC circuit character,and more convenience for IC defect analysis and Location.