Prepatterned optical circuits in thin ion-sliced single-crystalfilms of LiNbO3 |
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| Authors: | Radojevic A.M. Osgood R.M. Jr. Roy N.A. Bakhru H. |
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| Affiliation: | Microelectron. Sci. Lab., Columbia Univ., New York, NY; |
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| Abstract: | Crystal ion slicing was used in conjunction with conventional annealed proton exchange in Z-cut LiNbO3 to result in prepatterned microns-thick single-crystal LiNbO3 films with channel guides and a measured waveguide propagation loss of 0.2-0.7 dB/cm. Full optical circuit transfer, including a buffer layer and a patterned metal electrode structure for active control was demonstrated |
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