基于压电陶瓷的平面阵列式压力传感器研究

利用压电陶瓷技术,设计并制备整体式多阵列压力传感器,并用于爆炸冲击波压应力的测试.结果表明,阵列传感器可测试爆炸冲击波的压应力及其分布、体密度分布、面密度分布等参数,其静态电容分布偏差小于±1%,压电常数d_(33)分布偏差小于±3.3%,动态响应频率约为2.3 MHz,冲击破坏阈值为100 MPa量级.

Study on Planar Array Pressure Gauge Prepared by Piezoelectric Ceramics

Planar array and monoblock type pressure gauges were designed and prepared by piezoelectric ceramics,which were used to measure pressure of explosive blast successfully.The results showed that the pressure parameters of explosive blast (such as pressure distribution,volumetric density distribution,area density distribution) could be tested by planar array pressure gauges.Parameters of the sensor were following: distribution tolerance of static capacitance was less than ±1%,distribution tolerance of piezoelectric constant （d33）was less than ±3.3%,dynamic response frequency was 2.3 MHz,and breaking point of measuring pressure was 100MPa order of magnitude.