基于扰动前馈补偿的超精密机床伺服控制技术研究

为消除超精密机床伺服系统中各种扰动力矩及系统参数波动对控制系统性能的影响，研究了基于扰动前馈补偿与反馈技术相结合的控制方法。利用扰动前馈控制器实时补偿系统中的扰动力矩，而利用常规反馈控制器保证了系统的良好的动态特性，并将其应用于实际系统中。实验表明该控制策略使系统跟踪速度信号时对各种扰动有良好的抑制能力，系统的最大稳态跟踪误差小于±20nm。

Research on ultra-precision machine tools' servo control technique based on disturbance feedforward compensation

A research is made on control method based on combination of disturbance feedforward compensation with feed back technique, to eliminate affects of unaccounted external disturbances and parameters changes on the performance of control system in servo control system of machine tools. The disturbance feed forward conpensation is used to countervail the disturbance in realtime and the conventional feed back controller is used to ensure the stability and good dynamics. When the feedforward and feed back controller are applied to a practical system, the experiment showed that the system has a good disturbance repression when tracking speed signals, and the maximum steady-state trace error remains less than ± 20nm in closed loop positioning system.