Accuracy in linear dimensions measurement in scanning electron microscopes in microtechnology and nanotechnology |
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| Authors: | Yu. A. Novikov A. V. Rakov P. A. Todua |
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| Affiliation: | (1) Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, Russia;(2) Surface and Vacuum Properties Research Center, Moscow, Russia |
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| Abstract: | A study has been made on the effects of scanning electron microscope parameters on the accuracy in measuring the linear dimensions in microtechnology and nanotechnology. Definitions are given of the errors with which these parameters should be known for using such microscopes in such technologies. __________ Translated from Izmeritel’naya Tekhnika, No. 6, pp. 15–18, June, 2008. |
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| Keywords: | scanning electron microscope relief-structure linear dimensions |
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