Calibration of laser Doppler vibrometer and laser interferometers in high-frequency regions using electro-optical modulator |
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Affiliation: | 1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, State Key Laboratory of Laser Interaction with Matter, Changchun 130033, China;2. University of the Chinese Academy of Sciences, Beijing 10039, China;1. University of Twente, the Netherlands;2. Universitá Politecnica delle Marche, Italy;3. Loughborough University, UK;4. University of Wisconsin-Madison, United States;5. University of Maryland Baltimore County, United States;6. Imperial College London, UK;1. Centre for Audio, Acoustics & Vibration, Faculty of Engineering & IT, University of Technology Sydney, Ultimo, NSW 2007, Australia;2. Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough, Leicestershire LE11 3TU, UK;1. College of Automation & Electronic Engineering, Qingdao University of Science and Technology, No. 99 Songling Road, Qingdao, 266042, China;2. College of Electromechanical Engineering, Qingdao University of Science and Technology, No. 99 Songling Road, Qingdao, 266042, China |
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Abstract: | We proposed a new primary calibration method of a laser Doppler vibrometer (LDV) using the optical modulated excitation of an electro-optical modulator and validated this approach by comparing mechanical modulated excitation with homodyne laser interferometer at the National Metrology Institute of Japan (NMIJ). The velocity sensitivity of the LDV was evaluated with the uncertainty budget at a high-frequency range up to 1 MHz, which is indicated as the upper limit of 50 kHz in ISO (International Organization for Standardization) 16063–41. As the results, we confirmed that velocity sensitivities between optical and mechanical modulated excitations are flat within their uncertainty from 100 Hz up to 1 MHz. Moreover, in order to evaluate the accurate phase shift of the accelerometer up to 20 kHz using optical modulated excitation, we also revealed the reliability of two time shifts between homodyne and heterodyne laser interferometers. |
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Keywords: | Laser Doppler vibrometer Laser interferometer Electro-optical modulator Primary calibration Phase shift Time delay Accelerometer |
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