A large range compliant XY nano-manipulator with active parasitic rotation rejection |
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Affiliation: | 1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, 2 Yikuang Street, Harbin, 150080, China;1. Department of Mechanical Engineering, Villanova University, Villanova, PA, USA;2. Department of Mechanical Engineering, University of Utah, Salt Lake City, UT, USA |
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Abstract: | There is an increasing demand to achieve manipulating operations in nanometric precision and a macro-range (over a millimeter) simultaneously. In principle, it is possible to satisfy both requirements in a compact size taking advantages of flexure-based mechanisms, whereas limitations such as the parasitic rotation, cross-axis coupling, saturation may adversely affect the motion quality in nanometric level practically. Here, we propose a novel design methodology to actively prevent parasitic rotation of XY compliant mechanisms. Further, by means of design synthesis and real-time motion control, the prototype of manipulator is fabricated, which enables large motion range (±3 mm) along each actuation axis. Experimental results demonstrate a travel range of 2 mm × 2 mm with high linearity, small cross-axis coupling (< 0.4%), and low parasitic rotation (< 6.9 μ rad over 0.5 mm × 0.5 mm motion range). Moreover, the high natural frequency (~ 60 Hz) of the manipulator facilitates it to achieve high-precision motion with tracking error < 80 nm (20 Hz sinusoids). The experimental results of the proposed nano-manipulator outperform most of the existing ones. |
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Keywords: | Nano-positioning Flexure-based mechanism Parasitic motion reduction Motion control |
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