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Poly(vinyl alcohol)-based photosensitive water-borne coating for low-temperature color-filter production
Affiliation:1. College of Electronics and Information Engineering, Sichuan University, Chengdu 610065, China;2. College of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China;1. Institute of Logistics Science and Engineering, Shanghai Maritime University, Shanghai 201306, China;2. Anhui Longquan Silicon Materials Co.,Ltd, Huaiyuan, Anhui 233400, China;1. Key Laboratory of Digital Medical Engineering of Hebei Province, Baoding 071000, China;2. College of Electronic and Information Engineering, Hebei University, Baoding 071002, China;3. College of Physics Science and Technology, Hebei University, Baoding 071002, China
Abstract:A photosensitive water-borne overcoat comprising poly(vinyl alcohol), a glycoluril crosslinker, and a water-soluble photoacid generator was developed. The passivation coating has two features: low-temperature processability and applicability to organic-solvent-susceptible films. Photo-exposure and subsequent baking at 85 °C and development with water produced PGMEA-insoluble and transparent overcoat patterns. Uncured color patterns that were susceptible to the PGMEA-based coating solution remained intact after water-based overcoat application. By exploiting the features of the passivation coating, color patterns of green, red, and white were produced onto a glass substrate at a process temperature of 85 °C.
Keywords:Overcoat  Photolithography  Low-temperature  Color filter  TE"}  {"#name":"keyword"  "$":{"id":"k0030"}  "$$":[{"#name":"text"  "_":"Top-emission  OLED"}  {"#name":"keyword"  "$":{"id":"k0040"}  "$$":[{"#name":"text"  "_":"Organic light-emitting diode  LCD"}  {"#name":"keyword"  "$":{"id":"k0050"}  "$$":[{"#name":"text"  "_":"Liquid crystal display  CF"}  {"#name":"keyword"  "$":{"id":"k0060"}  "$$":[{"#name":"text"  "_":"Color filter  COE"}  {"#name":"keyword"  "$":{"id":"k0070"}  "$$":[{"#name":"text"  "_":"Color filter on encapsulation  PGMEA"}  {"#name":"keyword"  "$":{"id":"k0080"}  "$$":[{"#name":"text"  "_":"Propylene glycol methyl ether acetate (1-methoxy-2-propyl acetate)  PVA"}  {"#name":"keyword"  "$":{"id":"k0090"}  "$$":[{"#name":"text"  "_":"Poly(vinyl alcohol)  PAG"}  {"#name":"keyword"  "$":{"id":"k0100"}  "$$":[{"#name":"text"  "_":"Photoacid generator  PEB"}  {"#name":"keyword"  "$":{"id":"k0110"}  "$$":[{"#name":"text"  "_":"Post exposure bake  L/S"}  {"#name":"keyword"  "$":{"id":"k0120"}  "$$":[{"#name":"text"  "_":"Lines and spaces  DEV"}  {"#name":"keyword"  "$":{"id":"k0130"}  "$$":[{"#name":"text"  "_":"Development  QDCC"}  {"#name":"keyword"  "$":{"id":"k0140"}  "$$":[{"#name":"text"  "_":"Quantum dot color conversion
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