On the tunability of a MEMS based variable capacitor with a novel structure |
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Authors: | Hamed Mobki Morteza H Sadeghi Saeid Afrang Ghader Rezazadeh |
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Affiliation: | (1) Department of Mechanical Engineering, University of Tabriz, Tabriz, Iran;(2) Department of Electrical Engineering, Urmia University, Urmia, Iran;(3) Department of Mechanical Engineering, Urmia University, Urmia, Iran; |
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Abstract: | In this work a novel MEMS based variable capacitor has been presented. To increase the tunability and decrease the applied
voltage, the conventional fixed-fixed beam used in CPW lines has been changed to a fixed-simple supported beam. The proposed
structure is a simple cantilever micro-beam in the first step of deflection and is changed to a fixed-simple supported micro-beam
in the second step of motion. In the capacitive micro-structures increasing the applied voltage decreases the equivalent stiffness
of the structure and leads the system to an unstable condition by undergoing to a saddle node bifurcation. In the proposed
structure to avoid pull-in instability and increase the capacitance tuning range, mechanical stiffness of the structure is
increased by changing boundary conditions by locating a pedestal in the end of the cantilever beam. The governing nonlinear
equation for static deflection of the micro-beam, based on Euler–Bernoulli micro-beam theory has been presented. The results
show that the proposed structure increases the capacitance tuning range and decreases the applied voltage. The results also
show that the position of the pedestal affects the tunability and the threshold voltage of the structure. |
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Keywords: | |
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