| 基于陶瓷基体铂薄膜电阻热式气体质量流量计设计 |
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| 引用本文： | 刘志亮,姜国光.基于陶瓷基体铂薄膜电阻热式气体质量流量计设计[J].传感器与微系统,2016(2). |
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| 作者姓名： | 刘志亮 姜国光 |
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| 作者单位： | 1. 北京动力机械研究所,北京,100074;2. 中国电子科技集团公司 第四十九研究所,黑龙江 哈尔滨,150001 |
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| 摘 要： | 提出了一种基于陶瓷基体铂薄膜电阻热式气体质量流量计的设计方法,分析了热式气体流量计的原理,制作了陶瓷铂电阻流量敏感元件,为降低加热功耗,提出了通孔方案.设计了恒温差控制电路和MSP430单片机处理电路,并制作出了实际样机.采用音速喷嘴标定装置对样机进行了标定和测试,该流量计的测量范围500~1 500 kg/h,精度±0. 5%,响应时间2 s,能够满足大工业气体管道流量的测量要求,具有广阔的应用前景.
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| 关 键 词： | 热式 气体流量计 质量流量 |
Design of thermal gas mass flowmeter based on platinum film resistors on ceramic substrate |
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| LIU Zhi-liang,JIANG Guo-guang.Design of thermal gas mass flowmeter based on platinum film resistors on ceramic substrate[J].Transducer and Microsystem Technology,2016(2). |
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| Authors: | LIU Zhi-liang JIANG Guo-guang |
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| Abstract: | A kind of design method for thermal gas mass flowmeter based on platinum film resistors on ceramic substrate is presented,principle of thermal gas flowmeter is analyzed,platinum resistive flow sensor based on ceramic substrate is made. In order to reduce power supply,through-hole scheme is proposed. A prototype is fabricated with a thermostatic control circuit and MSP430 MCU processing circuit. Calibration and test are implemented using sonic nozzle calibration device,measurement range of flowmeter is 500~1 500 kg/h,precision is ±0. 5%,and response time is 2 s,which meet demand for most industrial pipe air mass flow test,and has broad application prospects. |
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| Keywords: | thermal air flowmeter mass flow |
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