Waveguide-surfatron型表面波等离子体源的特性研究

报道了所研制的Waveguide-surfatron型表面波等离子体源的特性，理论计算表明，激发表面波模式为m≥l模，在放电室中电磁场均匀性与等离子体的密度有关。实验结果指出，采用Ar气放电，在气压为10～1000Pa，微波功率800～1000W的范围内可形成大面(体)积(直径为160mm)等离子体，其电子温度为1～4eV,等离子体密度为10

Characteristics of PlasmaSource of Waveguide-surfatron Surface Wave

A novel plasma source has been successfully developed for surface waves excited by the waveguide-surfatron and its characteristics was studied.The theoretical analyses show that the modes of the surface wave are greater than l,(m≥l),and the uniformity of the electromagnetic field in the discharge chamber depends on the plasma density.Experimental results show that large size(with a diameter over 160 mm)uniform plasma can be produced at a pressure of 10～1000 Pa with a microwave power of 800～1000 W for argon gas.The plasma density is 1010～1011cm-3with electron temperature lower than 4 eV.In a typical pressure ranging from 10 to 230 Pa with a microwave power of 800 and 900 W,the measurement of the plasma densities is in good agreement with the calculation.