| BEPC同步辐射软X射线光刻光束线的总体设计特性 |
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| 引用本文： | 邵景鸿,徐正良.BEPC同步辐射软X射线光刻光束线的总体设计特性[J].光学精密工程,1993,1(1):13-21. |
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| 作者姓名： | 邵景鸿 徐正良 |
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| 作者单位： | 中国科学院长春光学精密机械研究所 长春130022
(邵景鸿)，中国科学院长春光学精密机械研究所 长春130022(徐正良) |
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| 摘 要： | 介绍我们为北京正负电子对撞机(Beijing Electron Position Collide,BEPC)同步辐射实验室建造的软X射线光刻光束线的总体设计思想,并说明其中的束线物理设计、反射镜扫描、调整机构、激光模拟光源、真空系统和电子学、微机控制等系统中的关键技术。此外,对束线中的关键器件之一的超薄铍窗(18μm厚)的耐压强度给出了与理论计算趋势相一致的实验结果。
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| 关 键 词： | X射线光刻 光束线 真空 扫描 铍窗 |
| 收稿时间： | 1993-01-18 |
Overall Design Characteristic of Soft X-Ray Lithograph Beamline for Synchrotron Radiation at BEPC |
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| Shao Jinghong,Xu Zhengliang.Overall Design Characteristic of Soft X-Ray Lithograph Beamline for Synchrotron Radiation at BEPC[J].Optics and Precision Engineering,1993,1(1):13-21. |
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| Authors: | Shao Jinghong Xu Zhengliang |
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| Affiliation: | Chang chun Institute of Optics and Fine Mechmices Chinese Academy of Sciences, Changchun, 130022 |
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| Abstract: | This paper describes our design considerations for the Soft X -ray Lithograph Beamline constructed for Synchrotron Radiation Lab of BEPC by our Institute during the period of Seventh 5 -year plan. The key technical problems in are solved the physical designs of the beamline, scanning and adjusting mechanism of the mirror, laser - simulating source , vacuum system , electronics and microcomputer control system. In addition, it is presented that experimemtal results of pressure-resisting intensity in accord with theory calculation, for the ultra-thin Berylium window that is one of the key diveces in the beamline. |
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| Keywords: | X-ray lithograph Beamline Vacuum Scanning Berylium - window |
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