State key Laboratory for Silicon Materials, CMSCE, Zhejiang University, Hangzhou 310027, PR China
Abstract:
p-Type indium-doped SnO2 thin films were successfully fabricated on degenerate n+ indium tin oxide glass and quartz glass by sol gel dip-coating method. It was found from the X-ray diffraction results that indium-doped SnO2 thin films were in the same rutile structure as that of undoped SnO2. Hall effect measurement results showed that for In/Sn ratio≤0.33 and process temperature approximately 525 °C, the indium-doped tin oxide were p-type. The I–V curve measurement of a prototype transparent pn+ junction consisting of a layer of p-type indium-doped SnO2 and a layer of degenerate n+ tin-doped indium oxide showed typical rectifying characteristics.