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Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications
Authors:Qiuling Chen  Gabriele Maccioni  Qiuping Chen  Adriano Sacco  Sergio Ferrero  Luciano Scaltrito
Affiliation:1. Politecnico di Torino, Department of Applied Science and Technology, C.so Duca degli Abruzzi 24, 10129, Turin, Italy
2. Microla Optoelectronics, Corso Castelfidardo 30/A, 10128, Turin, Italy
Abstract:Laser writing attached many attentions for fabrication micro-channels in microfluidics devices and lab-on-chip devices for biomedical applications. In this study, micro-channels were fabricated on different materials as masters using nanosecond diode-pumped solid state (DPSS) laser writing for imprinting on glass and polymer microfluidics devices. Good quality microstructures were fabricated on silicon, nickel alloy, cooper/brass and alumina, respectively by laser writing which proved that the nanosecond DPSS laser is suitable for rapid prototyping and rapid manufacturing of surface microstructures on different substrates as mask-less exposure system of imprinting.
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