屏蔽膜板随动式微细电铸技术基础研究

提出了屏蔽膜板随动式微细电铸技术，屏蔽阳极膜板随电沉积层的增加而微量移动，从而可以用厚度有限的屏蔽层制造出原理上高度不受限制的三维金属微结构。针对该工艺的特点研制了试验装置，利用紫外光刻制作的屏蔽阳极膜板开展了两种随动方式的研究，分别得到了侧壁陡直的微齿轮和具有倾斜轮廓的微十字结构。

Fundamental Research on Micro Electroforming Technology of Metal Microstructrues by Using a Movable Patterned Anode

A novel metal micro-parts fabrication technology was presented herein. The anode which also served as a mask was patterned by UV lithography, and used to confine the region of electrodeposition. With the increasing of the thickness of electrodeposition, the mask was detached from the electrodeposition surface and moved along a specific trajectory depended on the contour of the re quired structure periodically. In principle,the 3-dimensional microstructures with unlimited aspect ratio can be fabricated by this technology. Two types of movement between the mask and the cathode were carried out on the self-developed equipment to demonstrate its feasibility. Micro gears with ver tical sidewall and micro crosses with slanting profile have been produced.