| 金刚石红外增透保护膜的研制及特性拟合 |
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| 引用本文： | 褚沉,王辉.金刚石红外增透保护膜的研制及特性拟合[J].光学仪器,1996,18(5):19-24. |
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| 作者姓名： | 褚沉 王辉 |
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| 作者单位： | 复旦大学物理系!上海，200433，复旦大学物理系!上海，200433，复旦大学物理系!上海，200433，复旦大学物理系!上海，200433，复旦大学物理系!上海，200433 |
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| 摘 要： | 论述了在硅基板上用热灯丝法制备金刚石红外增透保护膜的工艺，通过多灯丝法、预打磨处理以及加偏压等方法得到了特性优良的金刚石薄膜，并利用对金刚石薄膜─硅板体系红外透射率的曲线拟合，推知了一系列不易直接测量的特性参数，如折射率，吸收系数，薄膜厚度等。
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| 关 键 词： | 金刚石红外增透保护薄膜 |
Fabrication and Simulation of Diamond Infrared Anti-reflection Protection Thin Films |
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| Chu Chen,Wang Hui,Xu Xing-ming,Ying Xuan-tong,Shen Yuan-hua.Fabrication and Simulation of Diamond Infrared Anti-reflection Protection Thin Films[J].Optical Instruments,1996,18(5):19-24. |
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| Authors: | Chu Chen Wang Hui Xu Xing-ming Ying Xuan-tong Shen Yuan-hua |
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| Abstract: | The technology of fabricating diamond infrared anti-reflection protection thin films on St substrates by HF CVD is presented in this paper. Using multifilament, prescrach and adding a bias,we got the diamond thin films with excellent properties. Through the simulation on the transmittance-wavelength curve of our sample,we got a serie of characteristric parameters which are not easy to measure directly,such as refraction index,absorptance and the thickness of the thin film. |
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| Keywords: | Diamond Infrared Anti-reflection Protection Thin Films |
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