| 八角形离轴非球面反射镜加工 |
| |
| 引用本文： | 张峰. 八角形离轴非球面反射镜加工[J]. 光机电信息, 2010, 27(12): 62-67 |
| |
| 作者姓名： | 张峰 |
| |
| 作者单位： | 中国科学院,长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林长春,130033 |
| |
| 摘 要： | 为了加工出高精度八角形离轴非球面反射镜,对离轴非球面反射镜的数控加工和检测技术进行了研究。介绍了非球面计算机控制光学表面成型（CCOS）技术及FSGJ非球面数控加工中心,对数控加工过程中小磨头的运动方式和运动轨迹进行了研究,阐述了离轴非球面反射镜研磨阶段的轮廓测量方法和抛光阶段的零位补偿检测方法,采用数控加工方法对一块八角形离轴非球面反射镜进行了加工。最终的检测结果表明,八角形离轴非球面反射镜的面形精度均方根值为0.018λ（λ=0.6328μm）,满足光学设计技术指标要求。
|
| 关 键 词： | 八角形离轴非球面 计算机控制光学表面成型 轮廓测量 零位补偿检测 |
Fabrication of Octagonal Off-axis Aspheric Mirror |
| |
| ZHANG Feng. Fabrication of Octagonal Off-axis Aspheric Mirror[J]. OME Information, 2010, 27(12): 62-67 |
| |
| Authors: | ZHANG Feng |
| |
| Affiliation: | ZHANG Feng (Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China) |
| |
| Abstract: | In order to fabricate octagonal off-axis aspheric mirror with fine surface figure accuracy, the fabrication and testing technologies of off-axis convex aspheric mirror were studied. The technique of the computer-controlled optical surfacing(CCOS)for manufacturing aspheric mirror and the FSGJ numerical control machine for processing aspheric surface were introduced. The motion model and motion trace of the small polishing tool were studied, and the contour testing and null testing of aspheric mirror were des... |
| |
| Keywords: | octagonal off-axis aspheric surface computer-controlled optical surfacing contour testing null testing |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
