波长为1.03nm的掠入射多层膜反射镜的设计

在软x射线短波段1.03nm处的掠入射多层膜反射镜的设计中，本文提出了一种理论设计的修改方法。该方法考虑了基底，膜层界面间的均方根粗糙度与反射率的影响，对界面的数学描述源于D.G.Sterns的散射理论。设计结果表明：要在1.03nm处制做较高反射率（10%）的掠入射多层膜反射镜，基底粗糙度小于0.56nm即可，使用超精加工的粗糙度为0.5nm的基片作为基底，沉积了多层膜反射镜后，其反射率结果是10%，与修改方法结果一致。

The Designing of Grazing Angle Multi-layer Mirrors at 1.03 nm

In the designing of a grazing angle multi layer mirror at the wavelength 1.03 nm in soft x ray regin,a modified method is presented in which the effect of root mean square roughness of substrate and interface to reflectance is considered and discussed.The mathematical describing for rough interface is from the scattering theory by D.G.Sterns.The design result shows that the substrate roughness should be smaller than 0.56 nm in order to fabricate the grazing angle multi layer mirror whose reflectance is greater than 10 %.According to the result above,we chose a finish machining substrate whose roughness is 0.50 nm and fabricated a multi layer mirror measured reflectance is 10 %,which is consistent to the modified method.