| 等离子体软X射线源及其用于微细加工的探讨 |
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| 引用本文： | 郭小明 罗承沐. 等离子体软X射线源及其用于微细加工的探讨[J]. 电工电能新技术, 1995, 0(1): 1-6,44 |
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| 作者姓名： | 郭小明 罗承沐 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 喷气式Ｚ箍缩等离子体装置可产生较强的脉冲软Ｘ射线，利用此Ｘ射线进行了初曝光实验。另外，本文对此装置用于微细加工从理论上进行了初步探讨。
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| 关 键 词： | 等离子体 软X射线 光刻 微细加工 |
A PLASMA SOFT x RAY SOURCE AND ITS APPLICTION IN MICROFABRICAION |
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| GUO Xiaoming,LUO Chengmu,ZHOU Zhaoying YE Xionying,LI Chengrong. A PLASMA SOFT x RAY SOURCE AND ITS APPLICTION IN MICROFABRICAION[J]. Advanced Technology of Electrical Engineering and Energy, 1995, 0(1): 1-6,44 |
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| Authors: | GUO Xiaoming LUO Chengmu ZHOU Zhaoying YE Xionying LI Chengrong |
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| Affiliation: | Tsinghua University |
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| Abstract: | A bright soft X-Ray can be produced employing a gas-puff Z-pinch plas-ma device. Some prelimiary lithographic results have been obtained with it.Theoretically study of microfabrications with this device have been carriedout in this paper. |
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| Keywords: | Plasma Soft X-Ray Lithograph Microfabrication |
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