固着磨粒切割线研究进展

游离磨粒线锯切割存在污染环境和切割效率低的不足,固着磨粒线锯切割具有切缝小、切片表面质量好、切割速度快和消除工业浪费等优点成为了人们的研究热点。固着磨粒线锯和游离磨粒线锯最主要的区别是切割线,切割线的特性直接影响硅片的切割质量及生产效率。本文阐述了固着磨粒线锯切割的优点,总结了目前几种固着磨粒切割线的制造方法,包括:电镀、电火花、钎焊、树脂、机械碾压和挤压与冲压等,并介绍了固着磨粒切割线的改进方法。

Progress of fixed abrasive cutting wire

The free abrasive wire saw cutting is not environment-friendly and has poor processing efficiency, The fixed abrasive wire saw has such advantages as ： small kerr loss ; good slicing surface integrity ; high cutting speed and reduced industrial waste. So the fixed abrasive wire saw cutting attracts more and more attention. The main difference between the two kinds of technology is the cutting wire, which directly impacts the quality of silicon cutting and production efficiency. This summary focused on progress of the fixed abrasive wire saws, including three chief parts ： （ 1 ） The advantage of fixed abrasive wire saw cutting; （2） The main manufacttlting methods of fixed abrasive wire saw which are： electroplating process, electrical discharge machining, brazing process, bonding with resin agent, mechanical embedding of abrasive grains into metal wires or stamping process; （3） The improvements of fixed abrasive wire saw.