Development of a new type of self-scanned electron image sensingintegrated circuit |
| |
| Authors: | Hatfield J.V. York T.A. Comer J. Hicks P.J. |
| |
| Affiliation: | Dept. of Electr. Eng., Univ. of Manchester Inst. of Sci. & Technol.; |
| |
| Abstract: | The design and fabrication of an integrated circuit which is a position-sensitive detector for low-energy (typically up to 100 eV) charged particles are discussed. The device comprises a linear array of electron-sensing electrodes coupled to detection and readout circuitry in the form of amplifiers and counters all integrated onto a single CMOS chip. The chip is intended to replace existing position-sensitive detection systems in electron spectrometers |
| |
| Keywords: | |
|
