| 边缘场致发射体的非正交有限差分算法模拟 |
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| 引用本文： | 汪琛,赵宏卫,王保平,童林夙.边缘场致发射体的非正交有限差分算法模拟[J].真空科学与技术学报,1997(5). |
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| 作者姓名： | 汪琛 赵宏卫 王保平 童林夙 |
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| 作者单位： | 东南大学电子研究所!南京210018 |
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| 摘 要： | 对边缘切致发射三极管进行了模拟，采用的模型为“鸡尾酒杯”结构。在静电分析中引入了一种新的数值计算方法──非正交曲线坐标系下的有限差分算法。由于取的坐标轴与边界重合。所以该方法能有效地处理任意形状的场致发射体。给出了电场强度和发射电流与几何因子的关系及I－U特性曲线。
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| 关 键 词： | 真空微电子学 场致发射 计算机辅助设计 有限差分法 非正交曲线坐标系 |
Simulation of Disk-edged Field Emitters Using FDM in Non-Orthogonal Curvilinear Coordinate System |
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| Wang Chen,Zhao Hongwei,Wang Baoping,Tong Linsu.Simulation of Disk-edged Field Emitters Using FDM in Non-Orthogonal Curvilinear Coordinate System[J].JOurnal of Vacuum Science and Technology,1997(5). |
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| Authors: | Wang Chen Zhao Hongwei Wang Baoping Tong Linsu |
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| Abstract: | A new numerical algorithm, finite -difference method in non-orthogonal curvilinear coordinate system(FDM-NOCCS),is proposed to simulate the disk-edged field emission triode . With the boundary-conforming coordinate lines,this method works well with arbitrary shaped microemitters.The simulation results are presented for a unit cell,consisting of a disk-edged field emitter with "cocktail glass"structure,a gate,and an anode. The dependence of the field enhancement factor and the emitted current upon geometrical factors are discussed. |
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| Keywords: | Vacuum microelectronics Field emission Computer-aided design Finitedifference method Non-orthogonal coordinate system |
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