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Electron-beam recrystallised polysilicon on silicon dioxide |
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| Authors: | Tomoyasu Inoue Kenji Shibata |
| Affiliation: | aToshiba Research and Development Centre, Kawasaki 210, Japan |
| Abstract: | |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ | |
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