| 高温环境下MEMS微构件动态特性测试技术研究 |
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| 引用本文： | 李晓轲,王晓东,佘东生,张涛,王立鼎.高温环境下MEMS微构件动态特性测试技术研究[J].测试技术学报,2010,24(1):78-83. |
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| 作者姓名： | 李晓轲 王晓东 佘东生 张涛 王立鼎 |
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| 作者单位： | 1. 辽宁省微纳米技术及系统重点实验室,辽宁,大连,116024
2. 辽宁省微纳米技术及系统重点实验室,辽宁,大连,116024;大连理工大学,精密与特种加工教育部重点实验室,辽宁,大连,116024 |
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| 基金项目： | 国家自然科学基金重点资助项目(50535030);;辽宁省自然科学基金资助项目(20062187) |
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| 摘 要： | 基于放电激励方法建立了高温环境下MEMS微构件动态特性测试系统,该系统主要由激励装置、激光多普勒测振仪、微构件温度控制系统组成.激励装置利用尖端放电产生的激波激励微构件,通过进给机构调节电极间距以改变激励能量.激励底座是用高温胶粘接而构成的多层结构,包括微构件安装板、十字载台、陶瓷绝缘片和板电极.微构件胶粘在底座上,其振动响应信号由多普勒测振仪测量,计算机对测量数据频谱分析后得到谐振频率.编写了基于LabVIEW的微构件温度控制软件,控制测试时温度.利用该测试系统,测试了微构件在室温~500℃环境下的谐振频率,得到了谐振频率随温度变化规律.
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| 关 键 词： | MEMS 动态特性测试 高温 放电激励 激光多普勒测振仪 |
Dynamic Characteristic Testing Technology of MEMS Microstructure in High Temperature Environment |
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| LI Xiaoke,WANG Xiaodong,SHE Dongsheng,ZHANG Tao,WANG Liding.Dynamic Characteristic Testing Technology of MEMS Microstructure in High Temperature Environment[J].Journal of Test and Measurement Techol,2010,24(1):78-83. |
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| Authors: | LI Xiaoke WANG Xiaodong SHE Dongsheng ZHANG Tao WANG Liding |
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| Affiliation: | 1.Key Laboratory for Micro/Nano Technology and System of Liaoning Province;Dalian 116024;China;2.Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education;Dalian University of Technology;China |
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| Abstract: | A dynamic testing system for MEMS microstructure in high temperature based on point discharge was developed,which was mainly composed of excitation device,Laser Doppler Vibrometer(LDV) and temperature control system.The excitation device used the shockwave generated by discharge to apply a shock excitation to the microstructure,which can regulate the distance between electrodes to change excitation power.The microstructure was cemented on the base that was a multilayer structure including MEMS carrier,criss... |
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| Keywords: | MEMS dynamic testing high temperature discharge excitation laser doppler vibrometer |
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